Fabrication of high-performance ALD-Al2O3/SiO2 nanolaminate coating for atomic oxygen erosion resistance on polyimide
Chi Yan, Jialin Li, Yuhao Dai, ZhiJiang Lan, Haobo Wang, Hua Tong, Xiaojun Ye, Xiao Yuan, Cui Liu, Hongbo Li
Topics & Concepts
PolyimideFabricationAtomic layer depositionCoatingMaterials scienceAtomic oxygenOxygenComposite materialLayer (electronics)ChemistryOrganic chemistryAlternative medicineMedicinePathologySemiconductor materials and devicesDiamond and Carbon-based Materials ResearchAnalytical Chemistry and Sensors