Chemical-mechanical polishing performance of core-shell structured polystyrene@ceria/nanodiamond ternary abrasives on sapphire wafer
Zhou Chen, Xiangyang Xu, Lei Dai, Haiming Gong, Shun‐Tian Lin
Topics & Concepts
Materials scienceSapphireComposite materialComposite numberAbrasivePolishingWaferSurface roughnessChemical-mechanical planarizationPolystyreneNanodiamondDiamondNanotechnologyOpticsLaserPolymerPhysicsDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing TechniquesForce Microscopy Techniques and Applications