Annealing effects on the properties of hydrogenated diamond-like carbon films doped with silicon and nitrogen
Hideki Nakazawa, Kazuki Nakamura, Hiroya Osanai, Yuya Sasaki, Haruto Koriyama, Yasuyuki Kobayashi, Yoshiharu Enta, Yushi Suzuki, Maki Suemitsu
Topics & Concepts
Materials scienceAnnealing (glass)HeterojunctionChemical vapor depositionPlasma-enhanced chemical vapor depositionSiliconDiamond-like carbonNitrogenDopingCarbon filmHydrogenForming gasAnalytical Chemistry (journal)Thin filmChemical engineeringNanotechnologyComposite materialOptoelectronicsChemistryOrganic chemistryEngineeringChromatographyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsSemiconductor materials and devices