Metal-Ferroelectric-Metal Structure for FeFET: Empowering High Performance in Data Storage Technology
Yunhui Jang, Yeojin Jeong, Duy Phong Pham, Junsin Yi
Topics & Concepts
FerroelectricityMaterials scienceThin filmOptoelectronicsCoercivityTinAtomic layer depositionElectrodeTransistorTitanium nitridePolarization (electrochemistry)NitrideLayer (electronics)DielectricNanotechnologyVoltageElectrical engineeringMetallurgyCondensed matter physicsPhysicsEngineeringChemistryPhysical chemistryFerroelectric and Negative Capacitance DevicesSemiconductor materials and devicesAdvanced Memory and Neural Computing