Ab-initio molecular dynamics simulations of the reactivity of MoS2 towards F2 molecules: Implications for etching processes
Lucas M. Farigliano, Patricia A. Paredes-Olivera, Eduardo M. Patrito
Topics & Concepts
DesorptionBilayerMonolayerReactivity (psychology)Etching (microfabrication)ChemistryVacancy defectMoleculeAdsorptionChemical physicsFluorineAb initioSulfurLayer (electronics)Inorganic chemistryPhysical chemistryCrystallographyOrganic chemistryMembranePathologyMedicineBiochemistryAlternative medicine2D Materials and ApplicationsMXene and MAX Phase MaterialsMetal and Thin Film Mechanics