Design of a flexure-based parallel XY micropositioning stage with millimeter workspace and high bandwidth
Ting-Wei Wang, Yingzi Li, Yingxu Zhang, Rui Lin, Jianqiang Qian, Zhipeng Dou
Topics & Concepts
WorkspaceMillimeterBandwidth (computing)Extremely high frequencyFinite element methodStage (stratigraphy)Computer scienceEngineeringStructural engineeringOpticsPhysicsTelecommunicationsPaleontologyBiologyRobotArtificial intelligencePiezoelectric Actuators and ControlAdvanced MEMS and NEMS TechnologiesNanofabrication and Lithography Techniques