Synthesis of Al2O3@MnO2 composite abrasives and their chemical mechanical polishing performance on silicon carbide (SiC)
Peijia Zhang, Hong Lei, Zefang Zhang, Jianhua Zhang, Shi-Dong Chen, Xiaogang Hu
Topics & Concepts
Materials scienceChemical-mechanical planarizationAbrasiveSilicon carbideComposite numberScanning electron microscopePolishingComposite materialWaferSurface roughnessNanotechnologyAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced materials and composites