Defect detection and classification on semiconductor wafers using two-stage geometric transformation-based data augmentation and SqueezeNet lightweight convolutional neural network
Francisco López de la Rosa, José L. Gómez-Sirvent, Rafael Morales, Roberto Sánchez-Reolid, Antonio Fernández‐Caballero
Topics & Concepts
Convolutional neural networkComputer scienceArtificial intelligenceArtificial neural networkAutomationSemiconductor device fabricationDeep learningTransformation (genetics)Machine learningSemiconductor industryWaferKey (lock)Pattern recognition (psychology)EngineeringIndustrial engineeringManufacturing engineeringMechanical engineeringGeneElectrical engineeringBiochemistryComputer securityChemistryIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisManufacturing Process and Optimization