Highly selective capacitive micromachined ultrasonic transducer–based miniature gravimetric CO2 sensor with in-situ calibration for relative humidity
Dovydas Barauskas, Donatas Pelenis, Mindaugas Dzikaras, Gailius Vanagas, Marius Mikolajūnas, Jonas Baltrušaitis, Darius Viržonis
Topics & Concepts
Ultrasonic sensorTransducerCapacitive sensingCapacitive micromachined ultrasonic transducersGravimetric analysisRelative humidityCalibrationMaterials scienceIn situHumidityAcousticsOptoelectronicsElectrical engineeringChemistryPhysicsEngineeringOrganic chemistryQuantum mechanicsThermodynamicsAdvanced Sensor Technologies ResearchRefrigeration and Air Conditioning TechnologiesFlow Measurement and Analysis