Modulation effect on mechanical properties of nanolayered MoN/MoSiN coatings
Binghao Liang, Fu-Shen Hsieu, Fan‐Bean Wu
Topics & Concepts
Materials scienceNanocrystalline materialAmorphous solidMolybdenumMicrostructureNitrideComposite materialLayer (electronics)Sputter depositionSputteringSilicon nitrideThin filmMetallurgyNanotechnologyCrystallographyChemistryMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchBoron and Carbon Nanomaterials Research