Wafer defect identification with optimal hyper-parameter tuning of support vector machine using the deep feature of ResNet 101
Santi Kumari Behera, Shishir Dash, Rajat Amat, Prabira Kumar Sethy
Topics & Concepts
Support vector machineHyperparameter optimizationArtificial intelligenceSemiconductor device fabricationHyperparameterPattern recognition (psychology)WaferBayesian optimizationComputer scienceMachine learningEngineeringElectrical engineeringIndustrial Vision Systems and Defect DetectionAdvanced Machining and Optimization TechniquesIntegrated Circuits and Semiconductor Failure Analysis