An ethylenediaminetetraacetic acid (EDTA) surface-functionalized CeO2 composite abrasives with the effective improvement of the removal rate on glass CMP
Xiaoyue Yuan, Hong Lei, Chuandong Chen
Topics & Concepts
Ethylenediaminetetraacetic acidMaterials scienceCeriumCerium oxideContact angleSurface modificationChemical-mechanical planarizationComposite numberX-ray photoelectron spectroscopyOxideChemical engineeringPolishingInorganic chemistryNuclear chemistryChelationMetallurgyComposite materialChemistryEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced machining processes and optimization