A generic approach of polishing metals via isotropic electrochemical etching
Rong Yi, Yi Zhang, Xinquan Zhang, Fengzhou Fang, Hui Deng
Topics & Concepts
PolishingEtching (microfabrication)Materials scienceIsotropyPassivationSurface roughnessReactive-ion etchingIsotropic etchingSurface finishingMetallurgyCurrent densityComposite materialLayer (electronics)AnisotropySurface finishOpticsQuantum mechanicsPhysicsAdvanced Surface Polishing TechniquesAdvanced Machining and Optimization TechniquesIntegrated Circuits and Semiconductor Failure Analysis