An ultrasonic vibration-assisted system development for inner-diameter sawing hard and brittle material
Hang Zhang, Yong-Chen Pei, Qin-Jian Liu, Lulu Wang
Topics & Concepts
SlicingMachiningUltrasonic sensorSurface roughnessBrittlenessVibrationUltrasonic machiningMaterials scienceMechanical engineeringSurface finishWaferStructural engineeringEngineering drawingEngineeringAcousticsComposite materialNanotechnologyPhysicsAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationAdvanced Machining and Optimization Techniques