Preparation of CeO2 abrasives by reducing atmosphere-assisted molten salt method for enhancing their chemical mechanical polishing performance on SiO2 substrates
Ning Xu, Jiahui Ma, Qi Liu, Yuxin Luo, Yongping Pu
Topics & Concepts
X-ray photoelectron spectroscopyMaterials scienceScanning electron microscopeSubstrate (aquarium)Fourier transform infrared spectroscopyAbrasiveTransmission electron microscopyChemical engineeringAnalytical Chemistry (journal)MetallurgyNanotechnologyComposite materialChemistryChromatographyGeologyEngineeringOceanographyAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced materials and composites