Enhanced Performance of Spiral Co-planar Inter-Digital Capacitive Structures for Sensing Applications
Binu Ani Oommen, J. R. Philip
Topics & Concepts
Capacitive sensingCapacitanceMaterials scienceElectrodePlanarSensitivity (control systems)Spiral (railway)DielectricPermittivityFinite element methodOptoelectronicsElectronic engineeringAcousticsElectrical engineeringComputer scienceEngineeringMechanical engineeringPhysicsComputer graphics (images)Structural engineeringQuantum mechanicsAdvanced MEMS and NEMS TechnologiesSensor Technology and Measurement SystemsSurface Roughness and Optical Measurements