A review on the statics and dynamics of electrically actuated nano and micro structures
Hossein Bakhshi Khaniki, Mergen H. Ghayesh, Marco Amabili
Topics & Concepts
Nanoelectromechanical systemsStaticsMicroelectromechanical systemsNanotechnologyCurrent (fluid)Coupling (piping)Materials scienceNano-VoltageField (mathematics)Scale (ratio)MechanicsMechanical engineeringEngineeringPhysicsClassical mechanicsElectrical engineeringComposite materialNanoparticleMathematicsQuantum mechanicsPure mathematicsNanomedicineMechanical and Optical ResonatorsAdvanced MEMS and NEMS TechnologiesForce Microscopy Techniques and Applications