Simulation of the effect of argon pressure on thermal processes in the sputtering unit of a magnetron with a hot target
В. И. Шаповалов, H. Ahmedov, Aleksandr A. Kozin, A. Demir, Beste Korutlu
Topics & Concepts
MultiphysicsSputteringSputter depositionMechanicsWork (physics)Materials scienceThermal conductivityArgonHeat transferThermalThermodynamicsChemistryAtomic physicsPhysicsComposite materialFinite element methodNanotechnologyThin filmMaterial Properties and ApplicationsAdvanced Power Generation TechnologiesRadiative Heat Transfer Studies