Experimental characterization and dynamical modeling evaluation for enhanced BTA removal by three amino acids in post-Cu-CMP cleaning
Shihao Zhang, Yazhen Wang, Baimei Tan, Fangyuan Wang, Xiaolong Wang, Haoyu Du
Topics & Concepts
AdsorptionBenzotriazoleChemistryAmino acidLysineChemical-mechanical planarizationCopperAmmonium hydroxideMoleculeInorganic chemistryOrganic chemistryLayer (electronics)BiochemistryAdvanced Surface Polishing TechniquesIntegrated Circuits and Semiconductor Failure AnalysisAdvanced Machining and Optimization Techniques