Fabrication and characterization of GaN HEMTs grown on SiC substrates with different orientations
Chung-Wang Su, Tongwen Wang, Meng‐Chyi Wu, Cheng‐Jung Ko, Junbin Huang
Topics & Concepts
TransconductanceHigh-electron-mobility transistorMaterials scienceOptoelectronicsFabricationTransistorSubstrate (aquarium)Saturation currentWide-bandgap semiconductorVoltageElectrical engineeringOceanographyMedicineGeologyEngineeringPathologyAlternative medicineGaN-based semiconductor devices and materialsGa2O3 and related materialsSemiconductor Quantum Structures and Devices