Process parameter optimization in Czochralski growth of silicon ingots: a Monte Carlo-finite element coupled model
Amir Reza Ansari Dezfoli, Swami Nath Maurya, Zary Adabavazeh, Yi‐Jen Huang
Topics & Concepts
Monte Carlo methodFinite element methodSiliconProcess (computing)Materials scienceMechanical engineeringComputer scienceEngineeringMetallurgyStructural engineeringMathematicsOperating systemStatisticsSilicon and Solar Cell TechnologiesAdvancements in Semiconductor Devices and Circuit DesignSemiconductor materials and devices