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Structural, electrical and gas-sensitive properties of Cr2O3 thin films

А. V. Аlmaev, Bogdan O. Kushnarev, Evgeny V. Chernikov, Vadim A. Novikov, П. М. Корусенко, С. Н. Несов

2021Superlattices and Microstructures43 citationsDOI

Topics & Concepts

Materials scienceAnnealing (glass)X-ray photoelectron spectroscopyThin filmAnalytical Chemistry (journal)Electrical resistivity and conductivityCrystalliteBand gapAtmospheric temperature rangeSputter depositionArgonStoichiometryAcetoneSputteringComposite materialChemical engineeringNanotechnologyOptoelectronicsChemistryPhysical chemistryMetallurgyOrganic chemistryMeteorologyEngineeringElectrical engineeringPhysicsGas Sensing Nanomaterials and SensorsTransition Metal Oxide NanomaterialsZnO doping and properties
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