Defective wafer detection using a denoising autoencoder for semiconductor manufacturing processes
Shu‐Kai S. Fan, Chia-Yu Hsu, Chih‐Hung Jen, Kuan-Lung Chen, Li-Ting Juan
Topics & Concepts
Anomaly detectionSemiconductor device fabricationWaferOutlierAutoencoderArtificial intelligenceComputer scienceWafer fabricationPattern recognition (psychology)Fault detection and isolationData miningEngineeringArtificial neural networkElectrical engineeringActuatorIndustrial Vision Systems and Defect DetectionAnomaly Detection Techniques and ApplicationsFault Detection and Control Systems