Gas cluster etching for the universal preparation of polymer composites for nano chemical and mechanical analysis with AFM
David W. Collinson, Dhriti Nepal, Jarrett Zwick, Reinhold H. Dauskardt
Topics & Concepts
Materials sciencePolymerNanocompositeNanotechnologyEtching (microfabrication)Composite materialComposite numberNanoparticleAtomic force microscopyMatrix (chemical analysis)Layer (electronics)Ion-surface interactions and analysisForce Microscopy Techniques and ApplicationsIntegrated Circuits and Semiconductor Failure Analysis