Homo- and hetero-epitaxial growth of β-gallium oxide via GaCl3-O2-N2 system
Kentaro Ema, Kohei Sasaki, Akito Kuramata, Hisashi Murakami
Topics & Concepts
EpitaxyGalliumPartial pressureHalideVapor phaseChemistryPhase (matter)OxideChlorineAnalytical Chemistry (journal)Gallium oxideMaterials scienceCrystallographyInorganic chemistryOxygenOrganic chemistryLayer (electronics)ThermodynamicsPhysicsGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques