Micro-heat sink based on silicon nanowires formed by metal-assisted chemical etching for heat dissipation enhancement to improve performance of micro-thermoelectric generator
Nguyễn Văn Toàn, Keisuke Ito, Trương Thị Kim Tươi, Masaya Toda, Po-Hung Chen, Mohd Faizul Mohd Sabri, Jinhua Li, Takahito Ono
Topics & Concepts
Heat sinkMaterials scienceThermoelectric effectIsotropic etchingThermoelectric generatorSiliconOptoelectronicsWaferNanotechnologyEtching (microfabrication)Mechanical engineeringThermodynamicsPhysicsEngineeringLayer (electronics)Advanced Thermoelectric Materials and DevicesThermal properties of materialsThermal Radiation and Cooling Technologies