Effects of bias voltage and substrate temperature on the mechanical properties and oxidation behavior of CrSiN films
Li-Chun Chang, Ming-Ching Sung, Yung-I Chen
Topics & Concepts
Materials scienceBiasingAmorphous solidSubstrate (aquarium)SputteringSputter depositionNanocompositeLayer (electronics)OxideComposite materialPhase (matter)Chemical engineeringAnalytical Chemistry (journal)Thin filmChemistryNanotechnologyVoltageMetallurgyCrystallographyOrganic chemistryQuantum mechanicsEngineeringGeologyOceanographyPhysicsMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchSemiconductor materials and devices