Ultra-sensitive graphene membranes for microphone applications
Gabriele Baglioni, Roberto Pezone, Sten Vollebregt, Katarina Cvetanović, Marko Spasenović, Dejan Todorović, Hanqing Liu, Gerard J. Verbiest, Herre S. J. van der Zant, Peter G. Steeneken
Abstract
We investigate the sound response of graphene membranes via laser Doppler vibrometry. We show that graphene's mechanical compliance is superior to that of MEMS devices and thus can enable the fabrication of smaller and more performant microphones.
Topics & Concepts
GrapheneMaterials scienceMicrophoneMicroelectromechanical systemsMiniaturizationAcousticsSensitivity (control systems)Distortion (music)MembraneOptoelectronicsNanotechnologyElectronic engineeringAmplifierPhysicsEngineeringChemistrySound pressureBiochemistryCMOSAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAdvanced Fiber Optic Sensors