Multi-Structure-Based Refractive Index Sensor and Its Application in Temperature Sensing
Zhaokun Yan, Shubin Yan, Ziheng Xu, Changxing Chen, Yuhao Cao, Xiaoran Yan, Chong Wang, Taiquan Wu
Abstract
In this paper, a new sensor structure is designed, which consists of a metal-insulator-metal (MIM) waveguide and a circular protrusion and a rectangular triangular cavity (CPRTC). The characterization of nanoscale sensors is considered using an approximate numerical method (finite element method). The simulation results show that the sharp asymmetric resonance generated by the interaction between the discrete narrow-band mode and the continuous wideband mode is called Fano resonance. The performance of the sensor is considerably influenced by CPRTC. The sensor structure has attained a sensitivity of 3060 nm/RIU and a figure of merit (FOM) of 53.68. In addition, the application of this structure to temperature sensors is also investigated; its sensitivity is 1.493 nm/°C. The structure also has potential for other nanosensors.