Influence of the bias-voltage, the argon pressure and the heating power on the structure and the tribological properties of HiPIMS sputtered MoSx films
Wolfgang Tillmann, Alexandra Wittig, Dominic Stangier, Henning Moldenhauer, Carl Arne Thomann, J. Debus, Daniel Aurich, Andreas Bruemmer
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceSputter depositionBiasingMicrostructureDeposition (geology)ArgonThin filmKinetic energyTribologyComposite materialPhysical vapor depositionSputteringVoltageNanotechnologyChemistryElectrical engineeringEngineeringOrganic chemistryPhysicsPaleontologyBiologySedimentQuantum mechanicsMetal and Thin Film MechanicsLubricants and Their AdditivesDiamond and Carbon-based Materials Research