High temperature AlN thin film ultrasonic transducers with dual mode wave excitation
Chang Xu, Xiaomei Zeng, Xiangyu Zhang, Zhong Zeng, Zhiwen Chen, D. Neena, Ming Li, Jun Zhang, Bing Yang, Sheng Liu, Vasiliy Pelenovich
Topics & Concepts
Materials scienceUltrasonic sensorTransverse planeDiffractionLongitudinal waveTransducerTransverse waveExcitationLongitudinal modeThin filmAtmospheric temperature rangeOpticsComposite materialWavelengthAcousticsOptoelectronicsWave propagationElectrical engineeringMeteorologyPhysicsEngineeringStructural engineeringNanotechnologyAcoustic Wave Resonator TechnologiesMetal and Thin Film MechanicsGaN-based semiconductor devices and materials