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Thickness-dependent physical and nanomechanical properties of <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" altimg="si1.svg"> <mml:mrow> <mml:mspace width="0.25em"/> <mml:mi mathvariant="bold">A</mml:mi> <mml:msub> <mml:mi mathvariant="bold">l</mml:mi> <mml:mi mathvariant="bold">x</mml:mi> </mml:msub> <mml:mi mathvariant="bold">G</mml:mi> <mml:msub> <mml:mi mathvariant="bold">a</mml:mi> <mml:mrow> <mml:mn>1</mml:mn> <mml:mo>−</mml:mo> <mml:mi mathvariant="bold">x</mml:mi> </mml:mrow> </mml:msub> <mml:mi mathvariant="bold">N</mml:mi> </mml:mrow> </mml:math> thin films

Najla Boughrara, Zohra Benzarti, Ali Khalfallah, J.C. Oliveira, Manuel Evaristo, A. Cavaleiro

2022Materials Science in Semiconductor Processing14 citationsDOI

Topics & Concepts

Materials scienceSapphireCoalescence (physics)Metalorganic vapour phase epitaxyChemical vapor depositionTrimethylgalliumNanotechnologyComposite materialEpitaxyOpticsLayer (electronics)LaserPhysicsAstrobiologyGaN-based semiconductor devices and materialsMetal and Thin Film MechanicsSemiconductor materials and devices
Thickness-dependent physical and nanomechanical properties of <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" altimg="si1.svg"> <mml:mrow> <mml:mspace width="0.25em"/> <mml:mi mathvariant="bold">A</mml:mi> <mml:msub> <mml:mi mathvariant="bold">l</mml:mi> <mml:mi mathvariant="bold">x</mml:mi> </mml:msub> <mml:mi mathvariant="bold">G</mml:mi> <mml:msub> <mml:mi mathvariant="bold">a</mml:mi> <mml:mrow> <mml:mn>1</mml:mn> <mml:mo>−</mml:mo> <mml:mi mathvariant="bold">x</mml:mi> </mml:mrow> </mml:msub> <mml:mi mathvariant="bold">N</mml:mi> </mml:mrow> </mml:math> thin films | Litcius