Improving anti-humidity property of In2O3 based NO2 sensor by fluorocarbon plasma treatment
Bingsheng Du, Tianjiao Qi, Jinshan Li, Yong He, Xi Yang
Topics & Concepts
HumidityFluorocarbonSelectivityInterference (communication)Materials scienceMoistureNitrogen dioxideLayer (electronics)Chemical engineeringWork (physics)PlasmaOptoelectronicsNanotechnologyChemistryComposite materialComputer scienceOrganic chemistryTelecommunicationsPhysicsMeteorologyCatalysisEngineeringThermodynamicsChannel (broadcasting)Quantum mechanicsGas Sensing Nanomaterials and SensorsAnalytical Chemistry and SensorsZnO doping and properties