Measurement of poly-Si film thickness on textured surfaces by X-ray diffraction in poly-Si/SiO passivating contacts for monocrystalline Si solar cells
Kejun Chen, Alexandra Bothwell, Harvey Guthrey, Matthew B. Hartenstein, Jana‐Isabelle Polzin, Frank Feldmann, William Nemeth, San Theingi, Matthew Page, David L. Young, Paul Stradins, Sumit Agarwal
Topics & Concepts
Monocrystalline siliconMaterials sciencePassivationSiliconPolycrystalline siliconOptoelectronicsDiffractionOpticsNanotechnologyLayer (electronics)PhysicsThin-film transistorSilicon and Solar Cell TechnologiesThin-Film Transistor TechnologiesIntegrated Circuits and Semiconductor Failure Analysis