Synthesis of n-type ZrO2 doped ε-Ga2O3 thin films by PLD and fabrication of Schottky diode
Yangyang Gao, Zhourui Xu, Xusheng Tian, Qian Feng, Xiaoli Lu, Chunfu Zhang, Jincheng Zhang, Yue Hao
Topics & Concepts
Materials scienceX-ray photoelectron spectroscopyThin filmSchottky diodeDopingPulsed laser depositionAnalytical Chemistry (journal)SapphireElectrical resistivity and conductivityBand gapSchottky barrierTinDiodeOptoelectronicsNanotechnologyChemistryChemical engineeringLaserOpticsElectrical engineeringPhysicsEngineeringChromatographyMetallurgyGa2O3 and related materialsZnO doping and propertiesSemiconductor materials and devices