Self-Sealing Complex Oxide Resonators
Martin Lee, Martin Robin, Ruben H. Guis, Ulderico Filippozzi, Dong Hoon Shin, Thierry C. van Thiel, Stijn Paardekooper, Johannes R. Renshof, Herre S. J. van der Zant, Andrea D. Caviglia, Gerard J. Verbiest, Peter G. Steeneken
Abstract
/complex oxide interface during the self-sealing anneal. Picosecond ultrasonics measurements confirm the improvement in the adhesion by 70% after annealing.
Topics & Concepts
PermeationMaterials scienceAnnealing (glass)MembraneOxideResonatorPicosecondNanotechnologyComposite materialChemical engineeringOptoelectronicsChemistryMetallurgyOpticsPhysicsLaserBiochemistryEngineeringMechanical and Optical ResonatorsAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator Technologies