High density, addressable electrohydrodynamic printhead made of a silicon plate and polymer nozzle structure
Yongqing Duan, Weili Yang, Jingjing Xiao, Jixin Gao, Lai Wei, YongAn Huang, Zhouping Yin
Abstract
simulation, and fabricating it through MEMS technology, a high-density nozzle array chip has been achieved which can generate very uniform dots without crosstalk. Meanwhile, by adding extractors underneath the nozzle array, and utilizing a digital switch array to tune their on/off state, addressable printing has been realized. This novel printhead design has solved the discharge, liquid flooding, and crosstalk behavior in EHD nozzle arrays, and is compatible with traditional silicon-based MEMS technology, which will promote the practical applications of EHD printing in micro/nanoelectronics, biomedical/energy devices,
Topics & Concepts
NozzleElectrohydrodynamicsMicroelectromechanical systemsMaterials scienceSiliconMicrofluidicsComb driveNanotechnology3D printingOptoelectronicsElectric fieldMechanical engineeringEngineeringFabricationComposite materialPhysicsAlternative medicinePathologyMedicineQuantum mechanicsElectrohydrodynamics and Fluid DynamicsElectrowetting and Microfluidic TechnologiesMicrofluidic and Bio-sensing Technologies