Defect levels in high energy heavy ion implanted 4H-SiC
Vibhor Kumar, A.S. Maan, Jamil Akhtar
Topics & Concepts
Materials scienceIon implantationSchottky diodeIonFluenceImpurityDiodeAnalytical Chemistry (journal)OptoelectronicsCarbon fibersAtomic physicsComposite materialChemistryChromatographyOrganic chemistryPhysicsComposite numberSilicon Carbide Semiconductor TechnologiesSemiconductor materials and interfacesIntegrated Circuits and Semiconductor Failure Analysis