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Order and disorder at the atomic scale: Microscopy applied to semiconductors

Enrico Di Russo, T. J. F. Verstijnen, P. M. Koenraad, Konstantinos Pantzas, G. Patriarche, Lorenzo Rigutti

2025Reviews of Modern Physics11 citationsDOIOpen Access PDF

Abstract

Atomic-scale details, especially those of disorder, are important for material properties, especially in semiconductors, but they are also extremely difficult to measure. Real-space methods can give direct access to this information, but typically, that access is limited. This review reports the application of three real-space techniques for measuring disorder to compound semiconductor materials: scanning tunneling microscopy, transmission electron microscopy, and atom-probe microscopy. Where possible, it emphasizes cases in which the probes have been combined to achieve a more complete picture of the defects.

Topics & Concepts

PhysicsSemiconductorAtomic unitsMicroscopyScale (ratio)Condensed matter physicsAtomic physicsNanotechnologyOpticsQuantum mechanicsMaterials scienceAdvanced Materials Characterization TechniquesForce Microscopy Techniques and ApplicationsSurface and Thin Film Phenomena