Effect of target peak power density on the phase formation, microstructure evolution, and mechanical properties of Cr2AlC MAX-phase coatings
Holger Rueß, Jonas Werner, Yeliz Unutulmazsoy, Jürgen W. Gerlach, Xiang Chen, Bastian Stelzer, Denis Mušić, S. Kolozsvári, P. Polcik, Thomas E. Weirich, Jochen M. Schneider
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceMicrostructurePhase (matter)Sputter depositionPower densityIonComposite materialSubstrate (aquarium)Chemical engineeringAnalytical Chemistry (journal)SputteringNanotechnologyThin filmPower (physics)ThermodynamicsChemistryGeologyOceanographyOrganic chemistryPhysicsEngineeringChromatographyMXene and MAX Phase MaterialsMetal and Thin Film MechanicsAluminum Alloys Composites Properties