Morphologies and optical properties of black silicon by room temperature reactive ion etching
François Atteia, Judikaël Le Rouzo, Lou Denaix, David Duché, Gérard Berginc, Jean Jacques Simon, Ludovic Escoubas
Topics & Concepts
AbsorptanceBlack siliconMaterials scienceReactive-ion etchingEtching (microfabrication)SiliconFinite-difference time-domain methodOptoelectronicsNanostructureNanotechnologyOpticsLayer (electronics)PhysicsReflectivityNanowire Synthesis and ApplicationsThin-Film Transistor TechnologiesSilicon Nanostructures and Photoluminescence