Fate of low molecular weight organic matters in reverse osmosis and vacuum ultraviolet process for high-quality ultrapure water production in the semiconductor industry
Yonghwan Kang, Jiuk Kwon, Jungbin Kim, Seungkwan Hong
Topics & Concepts
Ultrapure waterReverse osmosisChemistryPulp and paper industryProduced waterWastewaterMembraneChemical engineeringEnvironmental scienceEnvironmental engineeringEngineeringBiochemistryMembrane Separation TechnologiesAdvanced oxidation water treatmentWater Treatment and Disinfection