Electrical conductivity enhancement of indium tin oxide (ITO) thin films reactively sputtered in a hydrogen plasma
M.F. Al-Kuhaili
Topics & Concepts
Materials scienceIndium tin oxideHydrogenElectrical resistivity and conductivityThin filmIndiumSputteringAnalytical Chemistry (journal)ConductivityOxideBand gapOptoelectronicsChemistryNanotechnologyMetallurgyEngineeringChromatographyElectrical engineeringPhysical chemistryOrganic chemistryZnO doping and propertiesGas Sensing Nanomaterials and SensorsThin-Film Transistor Technologies