Scaled indium oxide transistors fabricated using atomic layer deposition
Mengwei Si, Zehao Lin, Zhizhong Chen, Xing Sun, Haiyan Wang, Peide D. Ye
Topics & Concepts
Materials scienceTransistorTransconductanceOptoelectronicsAtomic layer depositionIndiumOxideThreshold voltageSiliconFabricationThin-film transistorLayer (electronics)NanotechnologyVoltageElectrical engineeringMetallurgyEngineeringPathologyAlternative medicineMedicineThin-Film Transistor TechnologiesSemiconductor materials and devicesZnO doping and properties