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Compound mechanical and chemical-mechanical polishing processing technique for single-crystal silicon carbide

Xinxing Ban, Zhuangzhi Tian, Jianhui Zhu, Tianxu Duan, Shaodong Zheng, Ningchang Wang, Shaoxing Han, Hui Qiu, Zhengxin Li

2023Precision Engineering30 citationsDOI

Topics & Concepts

PolishingChemical-mechanical planarizationMaterials scienceSurface roughnessSilicon carbideMachiningCrystal (programming language)Surface finishCarbideComposite materialMetallurgyComputer scienceProgramming languageAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced machining processes and optimization
Compound mechanical and chemical-mechanical polishing processing technique for single-crystal silicon carbide | Litcius