Performance-driven semiconductor silicon crystal quality control
Yin Wan, Ding Liu, Jun-Chao Ren
Topics & Concepts
AutoencoderModel predictive controlProcess (computing)Control (management)Computer scienceData miningEngineeringArtificial neural networkControl theory (sociology)Control engineeringArtificial intelligenceOperating systemFault Detection and Control SystemsAdvanced Control Systems OptimizationAdvanced Algorithms and Applications