Controlling preferential growth of chromium – Nitrogen R-HiPIMS and R-DCMS films by substrate magnetic biasing
S. Vargas, D.S. Galeano-Osorio, Carlos E. Castano
Topics & Concepts
High-power impulse magnetron sputteringBiasingMaterials scienceSputter depositionAnalytical Chemistry (journal)SputteringCavity magnetronSubstrate (aquarium)MicrostructureThin filmNanotechnologyChemistryComposite materialVoltageElectrical engineeringChromatographyGeologyOceanographyEngineeringMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchSemiconductor materials and devices