Structural properties and sensing performance of TaOx/Ta stacked sensing films for extended-gate field-effect transistor pH sensors
Tung-Ming Pan, Chen-Hung Lin, See‐Tong Pang
Topics & Concepts
Materials scienceX-ray photoelectron spectroscopyAuger electron spectroscopySputter depositionSubstrate (aquarium)Transmission electron microscopyField-effect transistorAnalytical Chemistry (journal)Annealing (glass)SputteringThin filmTransistorOptoelectronicsNanotechnologyChemistryChemical engineeringVoltageOceanographyGeologyComposite materialQuantum mechanicsNuclear physicsEngineeringPhysicsChromatographyAnalytical Chemistry and SensorsGas Sensing Nanomaterials and SensorsElectrochemical Analysis and Applications