Preparation and characterization of slurry for CMP
Kangchun Lee, Jihoon Seo, Ungyu Paik
Topics & Concepts
SlurryCharacterization (materials science)Chemical-mechanical planarizationMaterials scienceWaferAbrasiveScratchMetallurgyParticle (ecology)Process engineeringComposite materialNanotechnologyEngineeringPolishingOceanographyGeologyAdvanced Surface Polishing TechniquesAdvanced materials and compositesDiamond and Carbon-based Materials Research