Mechanical performance of ITO/Ag/ITO multilayer films deposited on glass substrate by RF and DC magnetron sputtering
Zhaoxin Wang, Shunbo Wang, Jiru Wang, Yihan Niu, Xiangyu Zong, Cong Li, S.-J. Jiang, Hongwei Zhao
Topics & Concepts
Materials scienceThin filmSputter depositionComposite materialSurface roughnessAnnealing (glass)Residual stressLayer (electronics)Substrate (aquarium)OptoelectronicsSputteringNanotechnologyOceanographyGeologyZnO doping and propertiesMetal and Thin Film MechanicsAdvanced Sensor and Energy Harvesting Materials